관련링크
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large split type Stage
·Split Type Stage (for Laser Application)
·Dual Head, Align Vision, Inspection System
·Stroke of Table : 2,200mm
·Stroke of Head : 1,100mm
Item | Spec. |
Guide | LM Guide |
Max. Speed | 750mm/s |
Acceleration | 1.5G |
Accuracy | < ±1㎛ |
Repeatability | < ±0.5㎛ |
Horizontal Straightness | < ±5㎛ |
Vertical Straightness | < ±5㎛ |
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