관련링크
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multi-head gantry Stage
·worktable Size : 1100×800mm (Depend on Request)
·2.5G Acceleration in X, Y Direction
·Repeatability of DD Theta Table : < ±2 arcsec
Item | Spec. |
Guide | LM Guide |
Max. Speed | 750mm/s |
Acceleration | 2.5G |
Accuracy | < ±2㎛ |
Repeatability | < ±0.5㎛ |
Horizontal Straightness | < ±5㎛ |
Vertical Straightness | < ±7㎛ |
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