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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

자동정밀스테이지

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multi-head gantry Stage

·worktable Size : 1100×800mm (Depend on Request)

·2.5G Acceleration in X, Y Direction 

·Repeatability of DD Theta Table : < ±2 arcsec


 Item

Spec.

 Guide

LM Guide

Max. Speed

750mm/s

Acceleration

2.5G

 Accuracy

< ±2㎛

Repeatability

< ±0.5㎛

Horizontal Straightness

< ±5㎛

 Vertical Straightness

< ±7㎛

Large Size Stage Ⅱ Large Size Stage Ⅱ 20171010

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