관련링크
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Air bearing Stage
·Air bearing & Magnetic Preload Stage for Lithography
·Straightness of Scan : < ±1㎛@1,200mm
·Worktable Size : 600×600mm (Depend on Request)
·Repeatability : < ±0.2㎛
Item | Spec. |
Guide | Air bearing & LM Guide |
Max. Speed | 500mm/s |
Acceleration | 0.3G |
Accuracy | < ±2㎛ |
Repeatability | < ±0.2㎛ |
Horizontal Straightness | < ±1㎛@1,200mm |
Vertical Straightness | < ±3㎛@1,200mm |
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