관련링크
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High Acceleration Stage
·Linear Motion Guided Split Type Stage
·Acceleration of Head : 3G
·Vision Align Table included(Bi-Repeatability : < ±2㎛
Item | Spec. |
Guide | LM Guide |
Max. Speed | 750mm/s |
Acceleration | 2.5G |
Accuracy | < ±2㎛ |
Repeatability | < ±1㎛ |
Horizontal Straightness | < ±5㎛ |
Vertical Straightness | < ±5㎛ |
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