관련링크
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Single Axis Module
Item | Spec. |
Stroke | Up to 2,000mm (> 2,000mm by request) |
Accuracy | ±10㎛ per 300mm (brfore error-compentaion) |
Repeatability | ±1㎛ (in 0.5 or 0.1㎛ resolution) |
Flatness/Straightness | ±10㎛ per 300mm |
Max. Speed | 3,000mm/s |
Max. Capacity | 200kg (> 200kg by request) |
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