이노식스

 Item

Spec.

 Stroke

Up to 2,000mm (> 2,000mm by request) 

 Accuracy

±10㎛ per 300mm (brfore error-compentaion)

 Repeatability

±1㎛ (in 0.5 or 0.1㎛ resolution)

 Flatness/Straightness

±10㎛ per 300mm 

 Max. Speed

 3,000mm/s

 Max. Capacity

200kg (> 200kg by request)