관련링크
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split type Stage
·Installed Dual Type Laser Head (Multi-functional Laser Application)
·1G Acceleration & 1m/s Speed in X,Y direction
·Repeatability of DD Theta Table : < ±2arcsec
Item | Spec. |
Guide | LM Guide |
Max. Speed | 1,000mm/s |
Acceleration | 1G |
Accuracy | < ±2㎛ |
Repeatability | < ±1㎛ |
Horizontal Srtaightness | < ±2㎛ |
Vertical Straightness | < ±3㎛ |
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