관련링크
본문
vertical Stage
·Vertical Linear Stage (for Precision Inspection)
·Dual Inspection Head
·Inspection Size : 1600×1600mm
Item | Spec. |
Guide | LM Guide |
Max. Speed | 400mm/s |
Acceleration | 0.3G |
Accuracy | < ±2㎛ |
Repeatability | < ±1㎛ |
Horizontal Straightness | < ±4㎛ |
Vertical Straightness | < ±3㎛ |
Speed Ripple | < ±0.13% @ 20mm/s(100㎐) |
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